International Symposium on Sputtering and Plasma Processes (ISSP) was established in 1991. The main subject of the 1st symposium was Reactive Sputtering. It was the time that some new approaches to improve deposition rate and stability of the reactive sputtering process were started to be addressed. Since then, the symposium has been held biennially. At each symposium, the current topics and trends concerning sputtering and plasma processes have become the main focus and such topics have been discussed intensively.
This symposium has two characteristics. One is that the program committee is formed mainly by members from related industries. Hence, the general tendency of papers presented in the symposium is practical use of the sputtering technology and industrial relevancy. The other is that all the oral speakers including invited ones are requested to present their papers also at the poster session of the day of the oral presentation, giving unique opportunities for attendees to discuss details of the oral presentations with speakers.
We hope that every engineer and researcher in the world who is interested in sputtering and plasma processes attends this exciting symposium. We look forward to seeing you in Kanazawa.
|Invited Presentation||(40 minute oral and poster)|
|Presentation A||(20 minute oral and poster)|
All oral presentations are also discussed in the poster session.
Authors are expected to submit their camera-ready proceeding paper in A4 1-4 pages after the acceptance of their presentation.
Participants will receive one copy of the on-site proceedings at the symposium.
Peer-reviewed papers after the symposium will be published in Journal of Vacuum Science & Technology A.
|By June 2, 2017||After June 2, 2017|
|Member of SP-bukai, Vac. Soc. Jpn.||¥35,000||¥40,000|
|Member of Sponsoring Society||¥40,000||¥45,000|
|Member of Assisting Society||¥47,000||¥52,000|
Registration will be open from early March.
One "Best Poster Award" and two "Poster Awards" will be given to the author(s) of the outstanding poster presentations. Oral papers will be judged on their poster presentations. The award ceremony will be held at the last day of the symposium (July 7).
|Last Updated: 2017-01-17|